WLR（Wafer Level Reliability Testing，晶圓級可靠性測試）是一種專門用于評估半導體器件在晶圓階段可靠性的測試方法。這種測試方法在晶圓級直接對芯片進行可靠性測試，以確保器件滿足高質量和長壽命的要求。WLR測試包括一系列嚴格的應力測試，如熱載流子注入測試（HCI）、偏置溫度不穩(wěn)定壽命測試（BTI）電遷移（EM）、依時介電擊穿壽命測試（VTDDB）、升壓介電擊穿電壓測試（VRAMP）等。這些測試模擬了器件在各種極端條件下的工作環(huán)境，幫助工程師識別并改進工藝中的薄弱環(huán)節(jié)，提高產品的整體可靠性。
WLR測試廣泛應用于各種半導體器件的制造過程中，尤其在高性能和高可靠性要求的領域，如汽車電子、通信設備、消費電子和工業(yè)控制等。通過嚴格的晶圓級可靠性測試，制造商能夠保證其產品在實際應用中的穩(wěn)定性和耐久性，從而滿足客戶對高質量電子產品的需求。
| WLR Tester | T4000 (24/48/100 pin) |
| Standard Resources | HR_SMU+HS_SMU (4~36) |
| Pulse generator (2/4)# | |
| Signal analyzer (2)# | |
| Switch matrix | |
| LCR Meter (1/2)# | |
| Number of measurement pins | 24/48/100 |
| Voltage Coverage | ±200 V |
| Current Coverage | ±1 A |
| Voltage measure sensitivity | 100 nV |
| Current measure sensitivity | 10 fA or 0.1fA# |
| Voltage measure accuracy | 100uV |
| Current measurement accuracy | sub-pA |
| Maximum SMU sample rate | 1.8M samples/sec |
| Capacitance measurement accuracy | 10 fF# |
| RO Frequency Coverage | ~ 20MHZ# |
| Measurement Functions | DC Current / DC Voltage / Kelvin / Capacitance / Inductance AC Current / AC Voltage / Differential Voltage / Frequency Arbitrary Waveform / Clock Generation #/ Synchronization (triggering mode)# / C-V scan# |
| Typical Supported Test Items | VRAMP/JRAMP |
| VTDDB/JTDDB | |
| HCI | |
| BTI/BTI_OTF | |
| FASTRES/KELRES/ISO_EMR/TCR/TVP/CONSTANT_I | |
| Mean time between failures (MTBF) | > 1000 hours |
| Mean time to repair (MTTR) | < 6 hours |
| Uptime rate | ~ 97% |
# Can select based on user needs
* Both T4000 and T4100S can support WLR test if upgrading software
This table shows recommend testers at different application, if you have other requirements, please contact us.
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